Environment Specifics Stages | Ultra High Vacuum Piezo Stages
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- 작성자 :최고관리자
- 작성일 :작성일19.09.16
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SmarAct의 Stage는 주변 조건에서 애플리케이션 뿐만 아니라 고진공(HV, 1E-6 mbar) 및 초 고진공(UHV, 1E-11 mbar)과 같은 보다 극단적인 환경에서도 사용 가능합니다.
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Atmospheric Conditions
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High Vacuum (HV)
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Ultra-High Vacuum (UHV)
|
Ultra-High Vacuum (UHVT)
|
|
Pressure
|
-- |
Down to 1E-6 mbar |
Down to 1E-11 mbar |
Down to 1E-11 mbar |
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Wiring
|
Teflon-insulated stranded wires with braided shield and Teflon coating |
Teflon-insulated stranded wires with braided shield |
Kapton-insulated stranded wires |
Teflon-insulated stranded wires with braided shield |
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Grease
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Standard grease |
HV compatible grease |
Grease-free |
Grease-free |
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Sensor Options
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S, L, I |
S, L |
S |
S |
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Bake-Out Temperature
|
-- |
Up to 130°C upon request |
Recommended 130°C (max. 150°C) |
Recommended 130°C (max. 150°C) |
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Vacuum Feedthrough
|
-- |
LEMO
feedthroughs |
LEMO
compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum
flange |
LEMO
compatible steel multipin or D-SUB15 PEEK feedthroughs welded into vacuum
flange |
